Cleaning system, and method

A cleaning system, comprising:

• a cleaning device, comprising a soaking tank configured to accommodate a cleaner;
• a filtering system configured to filter a first substance;
• and
• a mask residue separation device;
• wherein the first substance is a mixture of the cleaner and a mask residue in the soaking tank, and
• wherein the filtering system comprising:
• a sucking apparatus, comprising a sucking port for sucking the first substance;
• a spraying apparatus, comprising a spraying port, the spraying port being oriented toward a region that the sucking pot is capable of sucking in a bottom of the soaking tank, and the spraying port configured to spray liquid to flush the bottom of the soaking tank;
• a filtering apparatus, connected to the sucking apparatus to receive and filter the first substance sucked by the sucking port, wherein the filtering apparatus comprising a cleaner filter configured to filter the first substance, wherein the cleaner filter comprises a barrel body configured to accommodate the first substance and a filter element arranged in the barrel body;
• a third pipeline, the mask residue separation device connected to the third pipeline, wherein the mask residue separation device is configured to separate the cleaner and the mask residue in a third substance, the third substance being a residue of the first substance, wherein the residue is blocked by the filter element of the cleaner filter;
• and
• a fourth pipeline having a first end communicated with the mask residue separation device and a second end connected to the spraying port to transfer a fourth substance into the spraying port, the fourth substance being a substance of which main component is the cleaner after the third substance is separated by the mask residue separation device.