Chemical solution supply system and chemical solution supply method
AssigneeKioxia Corporation
InventorsToshiyuki Muranaka, Yuichi Kuroda
Life of this patent
Estimating the term…
Abstract
According to one embodiment, there is provided a chemical solution supply system including: a tank configured to store a chemical solution; a first pipe connected to the tank and configured to provide the chemical solution; a first filter unit connected to the first pipe and having a first filter configured to filter the chemical solution; a second pipe connected to the first filter unit and configured to provide the chemical solution filtered by the first filter; and a detector connected to the first pipe and configured to detect foreign matter in the chemical solution in the first pipe.
Claims12
A chemical solution supply system comprising:
- a tank configured to store a chemical solution;
- a first pipe connected to the tank, the first pipe being configured to provide the chemical solution;
- a first filter unit connected to the first pipe, the first filter unit having a first filter configured to filter the chemical solution;
- a second pipe connected to the first filter unit, the second pipe being configured to provide the chemical solution filtered by the first filter;
- a further pipe directly connected to the first pipe;
- a valve provided on a first end of the further pipe;
- a detector directly connected to a second end of the further pipe, the detector being configured to detect an amount of foreign matter in the chemical solution in the first pipe wherein the further pipe is directly connected to the first pipe via the valve;
- and
- a calculation device configured to estimate a number of particles passing through the first filter based on the detected amount of the foreign matter in the chemical solution in the first pipe to determine a deterioration state of the first filter.
Dependencies are inferred from the claim text.