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US 12,135,437 B2Granted
MEMS actuator system
AssigneeMems Drive (Nanjing) Co., Ltd.
InventorsMatthew Ng, Xiaolei Liu, Guiqin Wang
Life of this patent
Estimating the term…
Abstract
A multi-axis MEMS assembly is configured to provide multi-axis movement and includes: a first in-plane MEMS actuator configured to enable movement along at least an X-axis; and a second in-plane MEMS actuator configured to enable movement along at least a Y-axis; wherein the first in-plane MEMS actuator is coupled to the second in-plane MEMS actuator.
Claims16
A multi-axis MEMS assembly configured to provide multi-axis movement, the multi-axis MEMS assembly comprising:
- a first in-plane MEMS actuator configured to enable movement along at least an X-axis;
- and
- a second in-plane MEMS actuator configured to enable movement along at least a Y-axis;
- wherein the first in-plane MEMS actuator is interconnected with the second in-plane MEMS actuator in a Z-axis by coupling moveable portions and fixed portions contained within the first in-plane MEMS actuator and the second in-plane MEMS actuator.
1 more element
A multi-axis MEMS assembly configured to provide multi-axis movement, the multi-axis MEMS assembly comprising:
- a first in-plane MEMS actuator configured to enable movement along at least an X-axis;
- a second in-plane MEMS actuator configured to enable movement along at least a Y-axis;
- and
- an optoelectronic device coupled to one of the first in-plane MEMS actuator and the second in-plane MEMS actuator;
- wherein the first in-plane MEMS actuator is interconnected with the second in-plane MEMS actuator in a Z-axis by coupling moveable portions and fixed portions contained within the first in-plane MEMS actuator and the second in-plane MEMS actuator;
- and
- wherein the first in-plane MEMS actuator and the second in-plane MEMS actuator form a stacked multi-axis micro-electrical-mechanical system (MEMS) actuator.
4 more elements
Dependencies are inferred from the claim text.