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US 12,134,596 B2Granted
Compound, resin, composition, resist pattern formation method, circuit pattern formation method and method for purifying resin
AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsTakashi Makinoshima, Junya Horiuchi, Masatoshi Echigo
Life of this patent
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Abstract
A compound represented by the following formula (1). The compound can be used as a film forming material for lithography or an optical component forming material. A resin may also be obtained using this compound as a monomer, a composition, a method for forming a resist pattern, a method for forming an insulating film, a method for forming a circuit pattern, and a method for purifying the above compound or resin.
Claims20
A compound represented by the following formula (1-1):
- wherein A is sulfur, oxygen, or a sulfonyl group;
- R1a is a hydrogen atom or a monovalent group having 1 to 10 carbon atoms;
- R1b is an n-valent aromatic group having 6 to 30 carbon atoms and does not include a heteroatom;
- R4 to R5 are each independently a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms and optionally having a substituent, an aryl group having 6 to 30 carbon atoms and optionally having a substituent, an alkenyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkynyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkoxy group having 1 to 30 carbon atoms and optionally having a substituent, a halogen atom, a nitro group, an amino group, a carboxylic acid group, a crosslinkable group, a dissociation group, a thiol group or a hydroxy group, wherein the alkyl group, the aryl group, the alkenyl group and the alkoxy group each optionally contain an ether bond, a ketone bond or an ester bond and at least one R4 and/or at least one R5 is a hydroxy group and/or a thiol group;
- R6 to R7 are each independently an alkyl group having 1 to 30 carbon atoms and optionally having a substituent, an aryl group having 6 to 30 carbon atoms and optionally having a substituent, an alkenyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkynyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkoxy group having 2 to 30 carbon atoms and optionally having a substituent, a halogen atom, a nitro group, an amino group, a carboxylic acid group, a crosslinkable group, a dissociation group, a thiol group or a hydroxy group, wherein the alkyl group, the aryl group, the alkenyl group and the alkoxy group each optionally contain an ether bond, a ketone bond or an ester bond;
- R10 to R11 are each a hydrogen atom;
- m4 and m5 are each independently an integer of 0 to 9;
- m6 and m7 are each independently an integer of 0 to 7;
- n is an integer of 1 to 4;
- and p2 to p5 are each independently an integer of 0 to 2.
7 more elements
A compound represented by the following formula (1c):
- wherein A is sulfur, oxygen, or a sulfonyl group;
- R1a is a hydrogen atom or a monovalent group having 1 to 10 carbon atoms;
- R1b is an n-valent aromatic group having 1 to 30 carbon atoms;
- R6 and R7 are each independently an alkyl group having 1 to 30 carbon atoms and optionally having a substituent, an aryl group having 6 to 30 carbon atoms and optionally having a substituent, an alkenyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkynyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkoxy group having 2 to 30 carbon atoms and optionally having a substituent, a halogen atom, a nitro group, an amino group, a carboxylic acid group, a crosslinkable group, a dissociation group, a thiol group or a hydroxy group, wherein the alkyl group, the aryl group, the alkenyl group and the alkoxy group each optionally contain an ether bond, a ketone bond or an ester bond;
- R10 and R11 are each a hydrogen atom;
- m6 and m7 are each independently an integer of 0 to 4;
- R8 and R9 are each independently an alkyl group having 1 to 30 carbon atoms and optionally having a substituent, an aryl group having 6 to 30 carbon atoms and optionally having a substituent, an alkenyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkynyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkoxy group having 1 to 30 carbon atoms and optionally having a substituent, a halogen atom, a nitro group, an amino group, a carboxylic acid group, a crosslinkable group, a dissociation group, a thiol group or a hydroxy group, wherein the alkyl group, the aryl group, the alkenyl group and the alkoxy group each optionally contain an ether bond, a ketone bond or an ester bond;
- R12 and R13 are each independently a hydrogen atom;
- and m8 and m9 are each independently an integer of 0 to 4.
6 more elements
Dependencies are inferred from the claim text.