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US 12,130,128 B2Granted
Device and method for measuring curvature radius
AssigneeShenzhen Supro Instruments Limited
InventorsKai Liang, Xiaobo Zhang, Zhengkai Chang
Life of this patent
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Abstract
A device for measuring a curvature radius includes a sample stage configured to support a sample to be measured, a diffracted light array generation module configured to generate and emit a diffracted light array to the sample, and a detection and analysis module configured to receive a reflected light array emitted from the sample and to obtain the curvature radius of the sample according to a dimension of the received reflected light array. Also disclosed is a method for measuring the curvature radius.
Claims15
A device for measuring a curvature radius, the device comprising:
- a sample stage, configured to support a sample to be measured;
- a diffracted light array generation module, configured to generate and emit a diffracted light array to the sample;
- and
- a detection and analysis module, configured to receive a reflected light array emitted from the sample and to obtain a curvature radius of the sample according to a dimension of a received reflected light array,
- wherein the detection and analysis module comprises:
- a sensor imaging screen, configured to receive the reflected light array emitted from the sample and to convert an optical signal of the reflected light array into an electrical signal;
- and
- an analysis unit, electrically connected to the sensor imaging screen and configured to obtain the curvature radius of the sample according to the electrical signal:
- wherein an emitting direction of the diffracted light array is perpendicular to the sample stage, and the curvature radius of the sample is obtained according to a following formula:
- R
- =
- 2
-
- H
-
- S
-
- (
- sec
-
- β
- )
- 2
-
- tan
-
- β
- +
- 2
-
- D
-
- S
-
- (
- tan
-
- β
- )
- 2
- +
- 4
-
- D
- 2
-
- S
- 2
- (
- tan
-
- β
- )
- 2
- +
- [
- 2
-
- H
-
- S
-
- (
- sec
-
- β
- )
- 2
-
- tan
-
- β
- +
- 2
-
- D
-
- S
-
- (
- tan
-
- β
- )
- 2
- ]
- 2
- 2
-
- D
- wherein,
- R denotes the curvature radius of the sample;
- S denotes a length of a first path of the diffracted light array from the diffracted light array generation module to a surface of the sample;
- H denotes a length of a second path of the reflected light array from the surface of the sample to the sensor imaging screen;
- β denotes a divergence angle of the diffracted light array;
- and
- D denotes a distance between an actual landing point and a preset landing point of the reflected light array on a detector, and D>0.
94 more elements
Dependencies are inferred from the claim text.