Semiconductor structure and manufacturing method thereof
AssigneesChangxin Memory Technologies, Inc., Beijing Superstrng Academy of Memory Technology
InventorsKang You, Jie Bai
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AssigneesChangxin Memory Technologies, Inc., Beijing Superstrng Academy of Memory Technology
InventorsKang You, Jie Bai
Estimating the term…
A semiconductor structure includes a substrate, a storage capacitor unit, a transistor, and an electrical connection structure. The storage capacitor unit is located at an array area and includes: N insulation posts, distributed in a direction parallel to a surface of the substrate; a bottom electrode layer; a top electrode layer, directly facing the bottom electrode layer; and a capacitor dielectric layer, located between the top and bottom electrode layers. One of the bottom or top electrode layers corresponding to the N insulation posts is a continuous film layer, and the other is discrete film layers. The transistor is located at a circuit area and includes a capacitor control terminal located in the substrate of the circuit area. The electrical connection structure is electrically connected to the capacitor control terminal, and extends from the circuit area to the array area to come into contact with a corresponding discrete film layer.
A semiconductor structure, having an array area and a circuit area, and comprising:
A manufacturing method of a semiconductor structure, the semiconductor structure having an array area and a circuit area, wherein the method comprises:
Dependencies are inferred from the claim text.