Method of manufacturing holding device, method of manufacturing structure for holding device, and holding device

A holding device that holds an object on a first surface of a plate-shaped member, the holding device comprising:

• the plate-shaped member that has the first surface substantially orthogonal to a first direction and a second surface on a side opposite to the first surface, the plate-shaped member including a first portion that includes the first surface and a fifth surface on a side opposite to the first surface, a second portion that includes the second surface, a fourth surface facing the fifth surface, and a portion made of a ceramic, and a first joining portion that is disposed between the fifth surface and the fourth surface, and that joins the fifth surface and the fourth surface to each other;
• a heater electrode that is disposed at the second portion of the plate-shaped member and that is formed from a resistance heater;
• a base member that has a third surface, that is disposed so that the third surface is positioned on a side of the second surface of the plate-shaped member, and that includes a cooling mechanism;
• and
• a second joining portion that is disposed between the second surface of the plate-shaped member and the third surface of the base member, and that joins the plate-shaped member and the base member to each other,
• wherein a groove at which a portion of a surface defining the groove is constituted by a portion of a surface of the heater electrode is formed in the fourth surface among surfaces of the second portion of the plate-shaped member, and
• wherein when electric power is supplied to the heater electrode and cooling is performed with the cooling mechanism, and when a difference between a temperature of the heater electrode and a temperature of the cooling is greater than or equal to 50° C., a difference between a maximum value and a minimum value of a temperature at the first surface is less than or equal to 3.5° C.