Cantilever microphone

A cantilever microphone, comprising:

• a substrate;
• a cantilever comprising a rotor frame and a plate covering the rotor frame, wherein the cantilever comprises a first edge fixed to the substrate and a second edge opposite to the first edge, a plurality of rotor comb fingers is attached to the plate at an edge of the plate adjacent to the second edge;
• and
• a stator fixed to the substrate or attached to a sub structure to allow some displacement from the substrate, wherein the stator comprises a plurality of stator comb fingers, and the plurality of stator comb fingers are interdigitated with the plurality of rotor comb fingers,
• wherein a gap is provided between the plurality of rotor comb fingers and the rotor frame, and
• wherein a material of the rotor frame comprises at least one of polycrystalline silicon, silicon nitride, silicon oxide, or silicon carbide,
• wherein a distance between the plate and an end of one of the plurality of stator comb fingers adjacent to the plate is controlled, to decrease electrostatic non-linearities and distortion.