Communication system, optical transmission device, and communication method
AssigneeHokuyo Automatic Co., Ltd.
InventorToshiaki Hayashiya
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AssigneeHokuyo Automatic Co., Ltd.
InventorToshiaki Hayashiya
Estimating the term…
A communication system for transmitting and receiving signals between an automated guided vehicle and a load port of a substrate processing device includes a first communication unit having a plurality of first communication parts configured to perform optical communication with the automated guided vehicle and connected to each other via a first communication line, and a second communication unit having a plurality of second communication parts respectively connected to a plurality of load ports and connected to each other via a second communication line. The plurality of first communication parts each constitute a pair with a predetermined one of the plurality of second communication parts. Also, one of the plurality of pairs is set as a communication pair, and signals are transmitted and received between the plurality of first communication parts and the plurality of second communication parts via the communication pair.
A communication system for transmitting and receiving signals between an automated guided vehicle and a load port of a substrate processing device, the system comprising:
A communication method in a manufacturing system including an automated guided vehicle, a substrate processing device, a first communication unit having a plurality of first communication parts configured to perform optical communication with the automated guided vehicle and connected to each other via a first communication line, and a second communication unit having a plurality of second communication parts respectively connected to a plurality of load ports of the substrate processing device and connected to each other via a second communication line, and the plurality of first communication parts each constituting a pair with a predetermined one of the plurality of second communication parts, the method comprising:
Dependencies are inferred from the claim text.