Back to results
US 12,119,804 B2Granted
Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsTakashi Yamane, Sho Nagatomo, Tetsuya Kimura
Life of this patent
Estimating the term…
Abstract
An acoustic wave device includes a piezoelectric layer, a first electrode, a second electrode, a first divided resonator, a second divided resonator, and a support substrate. The support substrate includes first and second energy confinement layers. The first energy confinement layer at least partially overlaps with a first region of the piezoelectric layer. The second energy confinement layer at least partially overlaps with a second region of the piezoelectric layer. The first and second energy confinement layers are integrally provided in the support substrate.
Claims19
An acoustic wave device configured to use a thickness shear primary mode bulk wave, the acoustic wave device comprising:
- a piezoelectric layer;
- and
- a first electrode and a second electrode facing each other in a direction intersecting with a thickness direction of the piezoelectric layer;
- wherein
- a material of the piezoelectric layer is lithium niobate or lithium tantalate;
- multiple electrode portions including the first electrode and the second electrode are provided;
- a first divided resonator and a second divided resonator connected in series without another resonator being connected between the first divided resonator and the second divided resonator, or connected in parallel with each other to a same connection node on a path connecting an input terminal and an output terminal;
- a support substrate including a first main surface and a second main surface opposed to each other are provided;
- the first divided resonator includes a first electrode portion of the multiple electrode portions and a first installation portion of the piezoelectric layer including a first region in which the first electrode portion is provided;
- the second divided resonator includes a second electrode portion of the multiple electrode portions and a second installation portion of the piezoelectric layer including a second region in which the second electrode portion is provided;
- the piezoelectric layer is directly or indirectly provided on the support substrate;
- the support substrate includes:
- a first energy confinement layer at least partially overlapping with the first region of the piezoelectric layer in a plan view from the thickness direction of the piezoelectric layer;
- and
- a second energy confinement layer at least partially overlapping with the second region of the piezoelectric layer in a plan view from the thickness direction of the piezoelectric layer;
- and
- the first energy confinement layer and the second energy confinement layer are integrally provided with each other in the support substrate.
14 more elements
An acoustic wave device, comprising:
- a piezoelectric layer;
- and
- a first electrode and a second electrode facing each other in a direction intersecting with a thickness direction of the piezoelectric layer;
- wherein
- the first electrode and the second electrode are adjacent to each other;
- d/p is about 0.5 or less in any section along the thickness direction of the piezoelectric layer with a distance between center lines of the first electrode and the second electrode denoted as p, and a thickness of the piezoelectric layer denoted as d;
- a material of the piezoelectric layer is lithium niobate or lithium tantalate;
- multiple electrode portions including the first electrode and the second electrode are provided;
- a first divided resonator and a second divided resonator connected in series without another resonator being connected between the first divided resonator and the second divided resonator, or connected in parallel with each other to a same connection node on a path connecting an input terminal and an output terminal;
- a support substrate including a first main surface and a second main surface opposed to each other are provided;
- the first divided resonator includes a first electrode portion of the multiple electrode portions and a first installation portion of the piezoelectric layer including a first region in which the first electrode portion is provided;
- the second divided resonator includes a second electrode portion of the multiple electrode portions and a second installation portion of the piezoelectric layer including a second region in which the second electrode portion is provided;
- the piezoelectric layer is directly or indirectly provided on the support substrate;
- the support substrate includes:
- a first energy confinement layer at least partially overlapping with the first region of the piezoelectric layer in a plan view from the thickness direction of the piezoelectric layer;
- and
- a second energy confinement layer at least partially overlapping with the second region of the piezoelectric layer in a plan view from the thickness direction of the piezoelectric layer;
- and
- the first energy confinement layer and the second energy confinement layer are integrally provided with each other in the support substrate.
16 more elements
Dependencies are inferred from the claim text.