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US 12,119,803 B2Granted
Bulk acoustic wave resonators having convex surfaces, and methods of forming the same
AssigneeTexas Instruments Incorporated
InventorTing-Ta Yen
Life of this patent
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Abstract
In one example, a method of forming a bulk acoustic wave (BAW) resonator comprises: forming an electrode on at least one of a semiconductor substrate, a sacrificial layer, or an acoustic reflector; and forming a piezoelectric layer on the electrode, the piezoelectric layer having a convex surface.
Claims20
A method, comprising:
- forming an electrode of a bulk acoustic wave (BAW) resonator on at least one of a semiconductor substrate, a sacrificial layer, or an acoustic reflector;
- and
- forming a piezoelectric layer of the BAW resonator on the electrode, in which the electrode covers entirely a surface of the piezoelectric layer, and the piezoelectric layer has a convex portion with a non-uniform thickness.
Dependencies are inferred from the claim text.