Top-emitting vertical-cavity surface-emitting laser with bottom-emitting structure
AssigneeLumentum Operations LLC
InventorAlbert Yuen
Life of this patent
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Abstract
A vertical cavity surface emitting laser (VCSEL) may include a substrate layer, epitaxial layers on the substrate layer, and angled reflectors configured to receive an optical beam emitted toward a bottom surface of the VCSEL and redirect the optical beam through an exit window in a top surface of the VCSEL. In some implementations, the angled reflectors may be formed in the substrate layer. Additionally, or alternatively, the VCSEL may include molded optics, where the molded optics include the angled reflectors. In some implementations, the exit window may include an integrated lens.
Claims20
An optical device, comprising:
- a top surface;
- a bottom surface;
- a first angled reflector formed in the bottom surface;
- a second angled reflector formed in the bottom surface at an angle relative to the first angled reflector,
- wherein the first angled reflector is configured to receive an optical beam emitted toward the bottom surface and redirect the optical beam toward the second angled reflector, and
- wherein the second angled reflector is configured to redirect the optical beam through an exit window in the top surface;
- and
- a plurality of epitaxial layers,
- wherein at least one of the plurality of epitaxial layers is etched away to form the exit window.
An optical device, comprising:
- a chip having a top surface and a bottom surface;
- an emitting region positioned at a periphery of the chip and configured to emit an optical beam toward the bottom surface;
- an exit window in the top surface that is positioned toward a center of the chip;
- a first angled reflector formed in the bottom surface;
- and
- a second angled reflector formed in the bottom surface at an angle relative to the first angled reflector,
- wherein the first angled reflector is configured to receive the optical beam from the emitting region and redirect the optical beam toward the second angled reflector, and
- wherein the second angled reflector is configured to redirect the optical beam through the exit window.
A method, comprising:
- forming, on a chip, an emitting region configured to emit an optical beam toward a bottom surface of the chip;
- forming, on a top surface of the chip, an exit window;
- and
- etching a substrate layer on the bottom surface of the chip to form a first angled reflector and a second angled reflector in the substrate layer,
- wherein the first angled reflector is angled relative to the second angled reflector and is configured to receive the optical beam and redirect the optical beam toward the second angled reflector, and
- wherein the second angled reflector is configured to redirect the optical beam through the exit window.
Dependencies are inferred from the claim text.