Semiconductor device having conductive field plate overlapping an edge of an active region
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Yu Chen, Wan-Hua Huang, Jing-Ying Chen
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Yu Chen, Wan-Hua Huang, Jing-Ying Chen
Estimating the term…
A semiconductor device includes an isolation structure in a substrate; and a gate structure over an active region of the substrate. The isolation structure surrounds the active region. The gate structure includes a first section parallel to a second section. The semiconductor device further includes a conductive field plate extending between the first section and the second section and overlapping an edge of the active region. A portion of the conductive field plate extends beyond the edge of the active region, The conductive field plate includes a dielectric layer having a first portion and a second portion, and the first portion is thicker than the second portion. The semiconductor device includes a first well overlapping the edge of the active region. The first well extends underneath the isolation structure. The conductive field plate extends beyond an outer-most edge of the first well.
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.