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US 12,119,297 B2Granted
Semiconductor device with multi-stacking carrier structure
AssigneeNanya Technology Corporation
InventorWei-Zhong Li
Life of this patent
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Abstract
The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes an inter-dielectric layer on a substrate; a conductive pad in the inter-dielectric layer; and a multi-stacking carrier structure including a first tier on the inter-dielectric layer, a second tier on the first tier, and a third tier on the second tier.
Claims18
A semiconductor device, comprising:
- a substrate;
- an inter-dielectric layer positioned on the substrate;
- a conductive pad positioned in the inter-dielectric layer;
- and
- a multi-stacking carrier structure comprising:
- a first tier comprising a first passivation layer positioned on the inter-dielectric layer, a first insulating layer positioned on the first passivation layer, and a first via positioned along the first passivation layer and the first insulating layer, and electrically connected to the conductive pad;
- a second tier positioned on the first tier and comprising a second passivation layer positioned on the first insulating layer, a second insulating layer positioned on the second passivation layer, and a second via positioned along the second passivation layer and the second insulating layer, and electrically connected to the first via;
- and
- a third tier positioned on the second tier and comprising a third passivation layer positioned on the second insulating layer, a third insulating layer positioned on the third passivation layer, and a third via positioned along the third passivation layer and the third insulating layer, and electrically connected to the second via;
- wherein a thickness ratio of a thickness of the multi-stacking carrier structure to a thickness of the substrate is between about 180:1 and about 50:1.
7 more elements
Dependencies are inferred from the claim text.