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US 12,119,257 B2Granted
Floating pin, wafer carrying device and depositing apparatus
AssigneeChangxin Memory Technologies, Inc.
InventorChaoqun Yu
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AssigneeChangxin Memory Technologies, Inc.
InventorChaoqun Yu
Estimating the term…
The present application provides a floating pin, a wafer carrying device and a depositing apparatus, which relates to the technical field of semiconductor apparatus, and is used for solving the technical problem of low yield of a workpiece to be processed. The floating pin includes a pin body and a pin head connected to one end of the pin body, wherein the pin head protrudes in relation to a side surface of the pin body, and a side surface of a protruding part of the pin head is a curved surface. By reducing the distance between the pin head and the workpiece to be processed, the impact force on the workpiece to be processed when the pin head collides with the workpiece to be processed can be reduced, damages to the workpiece to be processed can be reduced, and the yield of the workpiece to be processed can be improved.
A floating pin, comprising a pin body and a pin head connected to one end of the pin body, wherein the pin head protrudes in relation to a side surface of the pin body, and a side surface of a protruding part of the pin head is a curved surface;
A floating pin, comprising a pin body and a pin head connected to one end of the pin body, wherein the pin head protrudes in relation to a side surface of the pin body, and a side surface of a protruding part of the pin head is a curved surface;
A floating pin, comprising a pin body and a pin head connected to one end of the pin body, wherein the pin head protrudes in relation to a side surface of the pin body, and a side surface of a protruding part of the pin head is a curved surface;
Dependencies are inferred from the claim text.