Semiconductor device package having metal thermal interface material
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChien-Li Kuo, Chin-Fu Kao, Chen-Shien Chen
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChien-Li Kuo, Chin-Fu Kao, Chen-Shien Chen
Estimating the term…
A semiconductor device package is provided, including a package substrate, a semiconductor device, a metal lid, and a metal thermal interface material (TIM). The package substrate has a first surface. The semiconductor device is disposed over the first surface of the package substrate. The metal lid is disposed over the semiconductor device and the package substrate. The metal TIM is interposed between the metal lid and the top surface of the semiconductor device for bonding the metal lid and the semiconductor device. A shape of the lateral sidewall of the metal TIM in a longitudinal section is concave arc, and the outermost point of the lateral sidewall is within the boundary of the semiconductor device.
A semiconductor device package, comprising:
A semiconductor device package, comprising:
A semiconductor device package, comprising:
Dependencies are inferred from the claim text.