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US 12,119,234 B2Granted
Semiconductor structure and method for manufacturing same
AssigneeChangxin Memory Technologies, Inc.
InventorPing-Heng Wu
Life of this patent
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Abstract
A semiconductor structure includes: a base; a conductive column, which is at least located in the base; an electric connection layer, which is connected to an end part of the conductive column. The end part, towards the electric connection layer, of the conductive column has a first protruding part and at least one groove defined by the first protruding part, the electric connection layer has a second protruding part at a position corresponding to the groove, and the second protruding part is embedded in the groove.
Claims5
A method for manufacturing a semiconductor structure, comprising:
- providing a base, the base comprising a conductive column region;
- forming a first through hole in the base of the conductive column region, a bottom of the first through hole being provided with at least one first protruding structure;
- filling the first through hole to form a conductive column, the conductive column being provided with a groove at a first position corresponding to the first protruding structure, and the conductive column being provided with a first protruding part defining the groove;
- etching the base close to the first protruding structure to expose a bottom of the groove;
- and
- forming an electric connection layer filling up the groove, the electric connection layer being provided with a second protruding part at a second position corresponding to the groove;
- the method further comprising:
- before forming the first through hole, forming at least one initial isolation structure in the base, wherein the initial isolation structure is at least located in partial conductive column region;
- and the forming the first through hole comprises:
- removing the initial isolation structure located in the conductive column region until the base right below the initial isolation structure is exposed;
- and
- etching the base located in the conductive column region to form the first through hole.
9 more elements
Dependencies are inferred from the claim text.