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US 12,119,217 B2Granted
Substrate treatment method and substrate treatment apparatus
AssigneeSemes Co., Ltd.
InventorsSi Nae Song, Sung Bum Park, Ho Jin Jeong, Dong Ho Lim
Life of this patent
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Abstract
A substrate treatment method includes an auto-recovery operation of automatically recovering a substrate when a treatment process of treating the substrate is interrupted due to an occurrence of an abnormality and a chamber neutralization operation of neutralizing an inside of a process chamber including the substrate before the auto-recovery operation after the treatment process is stopped.
Claims15
A substrate treatment method comprising:
- automatically recovering a substrate when treating the substrate is interrupted due to an occurrence of an abnormality;
- neutralizing an inside of a process chamber including the substrate before the recovering after the treating is stopped;
- and before the neutralizing,
- adjusting a height of a treatment vessel including a plurality of bowls so that a residual treatment liquid used in the treating is recovered by one selected from among the plurality of bowls arranged around the substrate according to a type of the residual treatment liquid.
1 more element
A substrate treatment method comprising:
- a plurality of processes constituting treating a substrate;
- automatically recovering a substrate when treating is stopped due to an occurrence of an abnormality;
- neutralizing an inside of a process chamber including the substrate by discharging a neutralization liquid for neutralizing a residual treatment liquid inside the process chamber used in the treating before the automatically recovering after a treatment process is stopped;
- prior to the neutralizing, adjusting a height of a treatment vessel including a plurality of bowls so that the residual treatment liquid is recovered by one selected from among the plurality of bowls arranged around the substrate according to a type of the residual treatment liquid;
- and
- prior to the neutralizing, controlling a three-way valve so that a recovery line connected to one of the plurality of bowls communicates with one selected from a waste line and a recycle line according to the type of the residual treatment liquid.
3 more elements
Dependencies are inferred from the claim text.