Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier
AssigneeApplied Materials, Inc.
InventorsHenning Aust, Timo Adler, Clemens Pihan
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AssigneeApplied Materials, Inc.
InventorsHenning Aust, Timo Adler, Clemens Pihan
Estimating the term…
A magnetic levitation system for transporting a carrier is described. The magnetic levitation system includes a base defining a transportation track, a carrier movable relative to the base along the transportation track, and a plurality of active magnetic bearings provided at the base and configured to face a guided structure of the carrier. The guided structure includes a first guided zone and a second guided zone configured to interact with the plurality of active magnetic bearings and a recessed zone. The recessed zone is arranged between the first guided zone and the second guided zone in a transport direction of the carrier and is recessed with respect to the first guided zone and the second guided zone.
A magnetic levitation system for transporting a carrier, comprising:
A carrier of a magnetic levitation system, the carrier being movable along a transportation track defined by a base, the carrier comprising:
A base of a magnetic levitation system, the base defining a transportation track for a carrier and comprising:
A method of levitating a carrier, the carrier comprising a first guided zone, a second guided zone, and a recessed zone between the first guided zone and the second guided zone in a transport direction of the carrier, the method comprising:
A magnetic levitation system for transporting a carrier, comprising:
Dependencies are inferred from the claim text.