Inspection system, management apparatus, inspection method, recording medium, and manufacturing method of article

A management apparatus configured to manage an inspection condition of a first inspection step and an inspection condition of a second inspection step performed after the first inspection step, the management apparatus comprising:

• one or more memories;
• and
• one or more processors, wherein the one or more memories and the one or more processors are configured to:
• perform a respective series of inspection steps on a respective workpiece in a plurality of workpieces, wherein each series of inspection steps includes a first inspection step and a second inspection step;
• wherein the first inspection step includes obtaining a first image of the respective workpiece from an image capturing unit and determining, based on the first image, whether the respective workpiece includes a defect,
• wherein the second inspection step includes obtaining a second image of the respective workpiece from the image capturing unit and determining, based on the second image, whether the respective workpiece includes a defect, wherein the second image was captured after the first image was captured, and wherein the second inspection step is performed after the first inspection step,
• extract a defective portion candidate of the respective workpiece based on the first image and on the second image,
• change an inspection condition of the image capturing apparatus or the image capturing unit in the first inspection step based on the extracted defective portion candidate of the workpiece, and
• perform the first inspection step on another workpiece of the plurality of workpieces according to the changed inspection condition.

An inspection method comprising:

• performing, by a processing unit, a first inspection step on a first workpiece, wherein the first inspection step includes obtaining a first image of the first workpiece from an image capturing unit and determining, based on the first image, whether the first workpiece includes a defect;
• performing, by the processing unit, a second inspection step on the first workpiece, wherein the second inspection step includes obtaining a second image of the first workpiece from the image capturing unit and determining, based on the second image, whether the first workpiece includes a defect, wherein the second inspection step is performed after the first inspection step;
• extracting, by the processing unit, a defective portion candidate of the first workpiece based on the second image and on the first image;
• and
• changing, by the processing unit, an inspection condition of the image capturing unit or the processing unit in the first inspection step based on the extracted defective portion candidate of the first workpiece.

An inspection system, comprising:

• an image capturing unit configured to capture an image of a workpiece;
• and
• a processing unit configured to determine quality of the workpiece based on the image captured by the image capturing unit,
• wherein the processing unit determines whether the workpiece includes a defect based on a second image captured by the image capturing unit in a second inspection step,
• wherein the processing unit extracts a defective portion candidate of the workpiece based on the second image and a first image captured by the image capturing unit in a first inspection step performed before the second inspection step,
• wherein a machining step to machine the workpiece is performed between the first inspection step and the second inspection step, and
• wherein the processing unit changes an inspection condition of the image capturing unit or the processing unit in the first inspection step based on the extracted defective portion candidate of the workpiece.