Method and apparatus of evaluating quality of wafer or single crystal ingot
AssigneeSK Siltron Co., Ltd.
InventorHyun Woo Park
Life of this patent
Estimating the term…
Abstract
A method of evaluating quality of a wafer or an apparatus of evaluating quality of a wafer may include: performing a copper-haze evaluation on a piece of wafer or a single crystal ingot; collecting copper-haze map data and a copper-haze evaluation score based on a result of the copper-haze evaluation; training an artificial intelligence model based on the copper-haze map data and the copper-haze evaluation score; and performing crystal defect evaluation on the piece of the wafer or the single crystal ingot using the learned artificial intelligence model that outputs the copper-haze evaluation score when the copper-haze map data is input.
Claims7
A method of evaluating quality of a wafer, the method comprising:
- performing a copper-haze evaluation on a piece of wafer or a single crystal ingot;
- collecting copper-haze map data and a copper-haze evaluation score based on a result of the copper-haze evaluation;
- training an artificial intelligence model based on the copper-haze map data and the copper-haze evaluation score;
- and
- performing crystal defect evaluation on the piece of the wafer or the single crystal ingot using the learned artificial intelligence model that outputs the copper-haze evaluation score when the copper-haze map data is input,
- wherein the training of the artificial intelligence model based on the copper-haze map data and the copper-haze evaluation score comprises;
- performing learning data augmentation that generates at least one piece of virtual copper-haze map data based on the copper-haze map data;
- and
- training the artificial intelligence model using the copper-haze evaluation score corresponding to the virtual copper-haze map data generated according to the copper-haze map data and the learning data augmentation, and
- wherein the performing of the learning data augmentation comprises;
- dividing the copper-haze map data into a first region and a second region;
- performing image transformation on each of the divided first and second regions;
- and
- generating the virtual copper-haze map data based on each of the divided first and second regions on which the image transformation has been performed,
- wherein the first region and the second region are formed through a first heat treatment method and a second heat treatment method that are different from each other, respectively.
An apparatus of evaluating quality of a wafer, the apparatus comprising:
- an input unit that receives copper-haze map data of a wafer;
- a processor that evaluates the quality of the wafer using an artificial intelligence model learned so as to output a copper-haze score when the copper-haze map data is input;
- and
- a display unit that outputs a result of the quality of the wafer,
- wherein the processor performs learning data augmentation that generates at least one piece of virtual copper-haze map data based on the copper-haze map data and trains the artificial intelligence model using a copper-haze evaluation score corresponding to the virtual copper-haze map data generated according to the copper-haze map data and the learning data augmentation, and
- wherein the processor divides the copper-haze map data into a first region and a second region, performs image transformation on each of the divided first and second regions, and generates the virtual copper-haze map data based on each of the divided first and second regions on which the image transformation is performed.
Dependencies are inferred from the claim text.