Automated optical inspection method, automated optical inspection system and storage medium
AssigneeGlobalWafers Co., Ltd.
InventorsCheng-Wei Gu, Shang-Chi Wang, Chia-Yeh Lee
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AssigneeGlobalWafers Co., Ltd.
InventorsCheng-Wei Gu, Shang-Chi Wang, Chia-Yeh Lee
Estimating the term…
An automated optical inspection method, an automated optical inspection system, and a storage medium are provided. The method includes the following. An original image including first images of a target object is captured by an optical lens. An edge detection is performed on the original image to obtain an edge image including second images having an edge pattern. At least one of maximum, minimum, and average values of a pixel value in the second images is calculated. The edge image is divided into image blocks according to a unit area, and characteristic values are calculated according to the at least one of the maximum, minimum, and average values corresponding to the second images included in the image blocks. An optimal regression model is obtained by training a regression model corresponding to a defect of the target object according to the characteristic values and a data of the target object.
An automated optical inspection method adapted for an optical inspection system, the system comprising an optical lens and a processor, and the method comprising:
An automated optical inspection system, comprising:
A non-transitory computer readable storage medium, recording a program, and being loaded into a processor to:
Dependencies are inferred from the claim text.