Fabrication method of a memory and the memory
AssigneeChangxin Memory Technologies, Inc.
InventorsKangshu Zhan, Jun Xia, Qiang Wan, Tao Liu, Sen Li
Life of this patent
Estimating the term…
Loading patent…
AssigneeChangxin Memory Technologies, Inc.
InventorsKangshu Zhan, Jun Xia, Qiang Wan, Tao Liu, Sen Li
Estimating the term…
Embodiments provide a memory and a fabrication method thereof, and relates to the field of storage device technology to solve the technical problem of lower storage density of the memory. The fabrication method of the memory includes: providing a substrate including a central region and an edge region connected to each other, a first contact structure electrically connected to a wordline structure in the substrate being formed in the edge region; forming a second contact structure electrically connected to the first contact structure on the edge region; forming a capacitor structure electrically connected to the wordline structure on the central region; forming a third contact structure electrically connected to the second contact structure on the second contact structure; and forming a transistor structure electrically connected to the wordline structure on the capacitor structure and the third contact structure.
A fabrication method of a memory, comprising:
A memory, comprising:
Dependencies are inferred from the claim text.