Holding device and method of manufacturing holding device

A method of manufacturing a holding device which comprises a ceramic member having a first surface approximately perpendicular to a first direction and formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, an electricity supply connection member which is electrically conductive and is in contact with the heating resistor element;

• and an electricity supply terminal which is electrically conductive and is electrically connected to the electricity supply connection member, and which holds an object on the first surface of the ceramic member,
• the method being characterized by comprising the steps of:
• forming a coat layer which is a nitride selected from the group consisting of AlN, AlTiN, AlTiSiN, AlZrN, AlTiCrN, VN, and NbN on at least a portion of a surface of the heating resistor element, excluding its contact surface for contact with the electricity supply connection member;
• and
• forming, through firing, the ceramic member in which the electricity supply member and the heating resistor element having the coat layer formed thereon are disposed.