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US 12,113,512 B2Granted
Layout of XBARs with multiple sub-resonators in parallel
AssigneeMurata Manufacturing Co., Ltd.
InventorAndrew Guyette
Life of this patent
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Abstract
Acoustic filter devices and methods of making filter devices. An acoustic filter device includes a transversely-excited film bulk acoustic resonator (XBAR) including a plurality of sub-resonators and conductors to connect the plurality of sub-resonators in parallel between a first node and a second node. The conductors are configured such that a path length from the first node to the second node is effectively the same through each of the plurality of sub-resonators.
Claims20
An acoustic filter device comprising:
- a first port configured as an input of the acoustic filter device;
- a second port configured as an output of the acoustic filter device;
- a transversely-excited film bulk acoustic resonator (XBAR) comprising a plurality of sub-resonators;
- and
- a first interconnector and a second interconnector connecting the plurality of sub-resonators in parallel between the first port and the second port,
- wherein a first electrical path goes from the first port through the first interconnect, a first sub-resonator of the plurality of sub-resonators, and the second interconnect, to the second port,
- wherein a second electrical path goes from the first port through the first interconnect, a second sub-resonator of the plurality of sub-resonators, and the second interconnect, to the second port,
- wherein the first and second interconnectors are physically configured such that an electrical length from the first port to the second port is effectively a same electrical length for the first electrical path and the second electrical path.
5 more elements
An acoustic filter device comprising:
- a first port configured as an input of the acoustic filter device;
- a second port configured as an output of the acoustic filter device;
- an XBAR comprising a plurality of sub-resonators;
- and
- a first interconnector and a second interconnector that connect the plurality of sub-resonators in parallel between the first port and the second port,
- wherein a first electrical path goes from the first port through the first interconnect, a first sub-resonator of the plurality of sub-resonators, and the second interconnect, to the second port,
- wherein a second electrical path goes from the first port through the first interconnect, a second sub-resonator of the plurality of sub-resonators, and the second interconnect, to the second port,
- wherein the first and second interconnectors are physically configured such that an impedance between the first port and the second port is effectively a same impedance for the first electrical path and the second electrical path.
5 more elements
A method of making an acoustic filter device comprising:
- forming an XBAR comprising a plurality of sub-resonators between a first port configured as an input of the acoustic filter device and a second port configured as an output of the acoustic filter device;
- and
- forming a first interconnector and a second interconnector to connect the plurality of sub-resonators in parallel between the first port and the second port,
- wherein a first electrical path goes from the first port through the first interconnect, a first sub-resonator of the plurality of sub-resonators, and the second interconnect, to the second port,
- wherein a second electrical path goes from the first port through the first interconnect, a second sub-resonator of the plurality of sub-resonators, and the second interconnect, to the second port,
- wherein the first and second interconnectors are physically configured such that a path length from the first port to the port second node is effectively a same path length for the first electrical path and the second electrical path.
3 more elements
Dependencies are inferred from the claim text.