Laser device and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating laser light using a laser device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the laser device including:
• a chamber into which the laser gas is introduced;
• a pair of electrodes arranged in the chamber;
• a power source configured to apply a voltage between the electrodes;
• a nozzle structure which includes an internal passage for receiving the laser gas and a slit connected to the internal passage and is configured to generate flow of the laser gas between the electrodes due to the laser gas blowing out from the slit;
• a gas flow path which has a suction port through which the laser gas in the chamber is suctioned and introduces, to the nozzle structure, the laser gas suctioned through the suction port;
• and
• a blower device configured to cause the laser gas to blow toward the internal passage of the nozzle structure through the gas flow path.