Transistor and methods of forming integrated circuitry
AssigneeMicron Technology, Inc.
InventorsHung-Wei Liu, Sameer Chhajed, Jeffery B. Hull, Anish A Khandekar
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AssigneeMicron Technology, Inc.
InventorsHung-Wei Liu, Sameer Chhajed, Jeffery B. Hull, Anish A Khandekar
Estimating the term…
A transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. At least one of the top source/drain region, the bottom source/drain region, and the channel region are crystalline. All crystal grains within the at least one of the top source/drain region, the bottom source/drain region, and the channel region have average crystal sizes within 0.064 μm3 of one another. Other embodiments, including methods, are disclosed.
A transistor comprising:
A transistor comprising:
A transistor comprising:
Dependencies are inferred from the claim text.