Semiconductor device with guard ring isolating power device
AssigneeSK keyfoundry Inc.
InventorsKwangil Kim, Taehoon Lee, Hyunchul Kim, Insu Jung, Kyungbae Lee
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AssigneeSK keyfoundry Inc.
InventorsKwangil Kim, Taehoon Lee, Hyunchul Kim, Insu Jung, Kyungbae Lee
Estimating the term…
A power device and a guard ring structure surrounding the power device are provided. The power device includes: a buried layer of a first conductivity type and a buried layer of a second conductivity type disposed within a substrate; a body region of the first conductivity type and a drift region of the second conductivity type disposed on the buried layer of the first conductivity type; and a gate electrode, a source electrode, and a drain electrode disposed on the body region of the first conductivity type and the drift region of the second conductivity type. The guard ring structure includes: a first guard ring of the second conductivity type adjacent to the power device; a second guard ring of the first conductivity type adjacent to the first guard ring; and a third guard ring of the second conductivity type adjacent to the second guard ring.
A semiconductor device, comprising:
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.