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US 12,113,062 B2Granted
Fringe capacitor, integrated circuit and manufacturing process for the fringe capacitor
AssigneeTexas Instruments Incorporated
InventorsNaveen Tipirneni, Maik Peter Kaufmann, Michael Lueders, Jungwoo Joh
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Abstract
The present invention provides a capacitor having a first structure made of a metal layer and a second structure made of the same metal layer and a dielectric layer between the first and the second metal structure, wherein the dielectric layer has a relative permittivity greater than 4, in particular greater than 6. It also provides a monolithically integrated circuit including such a capacitor and optionally other components. A method of manufacturing such a capacitor is also provided.
Claims20
An integrated circuit, comprising:
- a transistor including a source, a drain, and a gate located between the source and the drain, wherein a metallic member is connected to the source and extends toward the drain over the gate, the metallic member including a side facing the drain and terminated between the gate and the drain;
- and
- a capacitor including a first structure made of a metallic layer, a second structure made of the metallic layer, and a dielectric layer laterally disposed between the first structure and the second structure, wherein the first structure is connected to the metallic member and extended above the metallic member, and the second structure is electrically connected to and located above the drain.
A monolithic integrated circuit, comprising:
- a capacitor including first and second electrodes formed of a metallic layer and an intralayer dielectric between the first and second electrodes;
- and
- a transistor including a source, a drain, and a gate located between the source and the drain, wherein a metallic member is connected to the source and extends toward the drain over the gate, the metallic member including a side facing the drain and terminated between the gate and the drain, wherein
- the first electrode is connected to the metallic member and extended above the metallic member;
- and
- the second electrode is electrically connected to and located above the drain.
3 more elements
Dependencies are inferred from the claim text.