PECVD apparatus

A plasma enhanced chemical vapor deposition (PECVD) apparatus, comprising:

• a substrate tray, a transfer chamber, a load lock, a cleaning chamber, a spin-drying chamber, a deposition chamber, and an unload lock;
• wherein the load lock, the cleaning chamber, the spin-drying chamber, the deposition chamber, and the unload lock are successively spirally arranged on a side wall of the transfer chamber;
• a spiral conveyor device is arranged in the transfer chamber, wherein the spiral conveyor device comprises a conveyor rod, a spiral drive mechanism, and a plurality of conveyor assemblies;
• wherein the conveyor rod is vertically arranged in the transfer chamber, and the plurality of conveyor assemblies are spirally arranged on the conveyor rod, and
• wherein the spiral drive mechanism is configured to drive the conveyor rod to undergo a spiral ascending or descending movement;
• and
• a spin-drying device is arranged in the spin-drying chamber, wherein the drying device comprises a drying support, and a support base, a lift mechanism, a plurality of clamp fingers, a connection rod, a rotation mechanism, and a jack mechanism;
• wherein the support base is in lift connection to the spin-drying support, and is driven to ascend or descend by the lift mechanism to receive the substrate tray fed by the conveyor assemblies,
• wherein the plurality of clamp fingers are circumferentially arrayed on an outer side of the support base, and are hinged to the spin-drying support, wherein a bottom of the support base is hinged to one end of the each of the clamp fingers via the connection rod,
• wherein the rotation mechanism is arranged at a bottom of the spin-drying support, and is configured to drive the drying support to reciprocally rotate,
• wherein the jack mechanism is arranged on the spin-drying support, and is configured to jack to separate a substrate on the substrate tray, and
• wherein the jack mechanism comprises a plurality of jack assemblies, each of the jack assemblies comprising a jack rod, a jack elastic member, and a press plate, wherein the press plate is secured to a bottom of the jack rod, two ends of the jack elastic member are respectively securely connected to the spin-drying support and the press plate, and the support plate and the spin-drying support are both provided with a jack groove slidably engageable with the jack rod.