Reaction chamber lining

A reaction chamber lining, comprising:

• an annular side wall main body and a flange arranged on an upper portion of the annular side wall main body, wherein an end face of the flange extends out of the side wall in a radial direction, an outer edge of the flange extends in the radial direction to form fixing flanging parts, and a hole is provided in each of the fixing flanging parts;
• the side wall is provided with a rectangular slot for alignment with a robotic arm access hole of a reaction chamber;
• the side wall is provided with through holes and honeycomb-shaped apertures;
• and a face joined to a bottom of the side wall is provided with a disc extending inwards in the radial direction, an extending end of the disc is for fitting with an outer edge of an electrode assembly arranged at the center of a reaction chamber, and a plurality of circles of slotted holes are annularly provided in the disc,
• a width of the slotted holes ranges from 3 mm to 5 mm, each circle is provided with a plurality of slotted holes, and a length of each of the slotted holes is a length of an arc with an angle between 20° and 40°,
• a gap between two adjacent circles of slotted holes ranges from 1 mm to 2.5 mm, and the two adjacent circles of slotted holes are distributed in a staggered manner, and
• an angle from an initial position of a first circle of slotted holes to an initial position of an adjacent inner circle of slotted holes ranges from 0° to 40°.