Sample holder and charged particle beam system
AssigneeJEOL Ltd.
InventorShuichi Yuasa
Life of this patent
Estimating the term…
Abstract
There is provided a sample holder which is for use in a charged particle beam system and which can prevent damage to a sample stage during transportation of a cartridge. The sample holder includes: the cartridge having the sample stage for holding a sample therein; and a holder base having a mounting portion to which the cartridge can be mounted. The cartridge has: a tilt mechanism for tilting the sample stage; and a lock lever which, when the cartridge has been taken out from the mounting portion, makes contact with the sample stage and limits tilt of the stage.
Claims6
A sample holder for use in a charged particle beam system, said sample holder comprising:
- a cartridge having a sample stage for holding a sample therein;
- a holder base having a mounting portion to which the cartridge can be mounted;
- and
- wherein the cartridge has:
- a tilt mechanism for tilting the sample stage;
- and a lock lever which, when the cartridge has been detached from the mounting portion, makes contact with the sample stage and limits tilt of the sample stage;
- a resilient member connected to said lock lever;
- wherein, when said cartridge has been taken out from said mounting portion, the lock lever is biased into contact with said sample stage by the resilient member;
- and
- wherein, when the cartridge has been mounted to the mounting portion, the lock lever strikes on a block mounted on the mounting portion and moves away from the sample stage.
A sample holder for use in a charged particle beam system, said sample holder comprising:
- a cartridge having a sample stage for holding a sample therein;
- and
- a holder base having a mounting portion to which the cartridge can be mounted;
- wherein the cartridge has:
- a tilt mechanism for tilting the sample stage;
- and a lock lever which, when the cartridge has been detached from the mounting portion, makes contact with the sample stage and limits tilt of the sample stage, and
- wherein said tilt mechanism has:
- a tilt arm connected to said sample stage;
- and
- a tilt lever connected to the tilt arm;
- wherein said holder base has a shaft which, when said cartridge has been mounted to said mounting portion, makes contact with the tilt lever to thereby tilt the sample stage, whereby the sample stage and said lock lever move away from each other.
Dependencies are inferred from the claim text.