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US 12,112,915 B2Granted
Vaporizer, ion source and method for generating aluminum-containing vapor
AssigneeNissin Ion Equipment Co., Ltd.
InventorsSami K. Hahto, George Sacco
Life of this patent
Estimating the term…
Abstract
A vaporizer includes a crucible in which an aluminum-containing solid material is placed, and a heater. The crucible includes a chlorine containing gas inlet and a vapor outlet. The heater heats the crucible.
Claims20
A vaporizer comprising:
- a crucible in which an aluminum-containing solid material is placed, the crucible comprising a chlorine containing gas inlet and a vapor outlet;
- and
- a heater configured to heat the crucible.
A method for generating aluminum containing vapor, the method comprising:
- heating an aluminum containing solid material in a crucible;
- and
- introducing a chlorine containing gas into the crucible.
A vaporizer comprising:
- a first gas source comprising a chlorine containing gas;
- a crucible containing an aluminum-containing solid material, the crucible comprising a gas inlet communicatively connected to the first gas source, and a vapor outlet;
- and
- a heater configured to heat the crucible.
1 more element
An ion source comprising:
- a first gas source comprising a first gas that contains chlorine;
- a vaporizer comprising:
- a crucible containing an aluminum-containing solid material, the crucible comprising a gas inlet communicatively connected to the first gas source, and a vapor outlet;
- and
- a heater configured to heat the crucible;
- an arc chamber configured to generate a plasma therein,
- wherein the vapor outlet of the vaporizer is configured to output vapor into the arc chamber through a wall of the arc chamber.
4 more elements
An ion source comprising:
- a vaporizer comprising:
- a crucible containing an aluminum-containing solid material, the crucible comprising a gas inlet at a first end of the crucible, and a vapor outlet at a second end of the crucible opposite from the first end;
- and
- a heater configured to heat the crucible;
- and
- an arc chamber in fluid communication with the vapor output, the arc chamber configured to generate a plasma using a vapor that is output from the vapor outlet,
- wherein the crucible receives a chlorine containing gas through the gas inlet and the chlorine containing gas reacts with the aluminum-containing solid material under heat from the heater to produce the vapor, which is output to the arc chamber through the vapor outlet.
4 more elements
Dependencies are inferred from the claim text.