Method of manufacturing a semiconductor device including PG-aligned cells
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHiranmay Biswas, Chung-Hsing Wang, Kuo-Nan Yang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHiranmay Biswas, Chung-Hsing Wang, Kuo-Nan Yang
Estimating the term…
A method of manufacturing a semiconductor device includes forming a set of cells; forming a PG layer, including forming a first metallization layer including forming first conductor portions and second conductor portions, corresponding ones of the first conductor portions being arranged in first pairs; corresponding ones of the second conductor portions being arranged in second pairs; the cells being arranged to overlap at least one of the first and second conductor portions of the first metallization layer relative to the first direction; and forming a second metallization layer over the first metallization layer, the second metallization layer including forming third conductor portions and fourth conductor portions, the cells being arranged in a repeating relationship that each cell overlaps, an intersection of a corresponding one of the first or second pairs with at least a corresponding one of the third conductor portions or a corresponding one of the fourth conductor portions.
A method of manufacturing a semiconductor device, comprising:
A method of manufacturing a semiconductor device, comprising:
A method of manufacturing a semiconductor device, comprising:
Dependencies are inferred from the claim text.