Back to results
US 12,111,570 B2Granted
Shaping system with cutouts in an optical diaphragm and method of use
AssigneeCanon Kabushiki Kaisha
InventorTeresa Perez Estrada
Life of this patent
Estimating the term…
Abstract
A shaping system and method of using the shaping system. The shaping system may comprise a radiation source; a template chuck configured to hold a template; and an optical diaphragm positioned between the template chuck and the radiation source. The optical diaphragm may have a plurality of blades. Each blade has a cutout in an edge of each blade. Edges and cutouts of the plurality of blades may form an opening which actinic radiation from the radiation source passes through.
Claims13
A shaping system comprising:
- a radiation source;
- a template chuck configured to hold a template;
- an optical diaphragm positioned between the template chuck and the radiation source;
- and
- the optical diaphragm has a plurality of blades, each blade having a cutout in an edge of the each blade,
- wherein each blade has two cutouts with a cutout width that are separated from each other by a cutout separation distance;
- wherein a cutout fraction is a cutout width divided by cutout separation distance;
- and
- wherein the cutout fraction is between 0.1-0.2,
- wherein edges and cutouts of the plurality of blades form an opening which actinic radiation from the radiation source passes through.
7 more elements
A method of shaping a film with a shaping system comprising:
- bringing a template into contact with formable material on a substrate;
- exposing the formable material to actinic radiation from a radiation source that has passed through an opening formed by an optical diaphragm;
- separating the template from the formable material,
- wherein the shaping system comprises:
- the radiation source;
- a template chuck configured to hold the template;
- an optical diaphragm positioned between the template chuck and the radiation source;
- and
- the optical diaphragm has a plurality of blades, each blade having a cutout in an edge of the each blade,
- wherein the optical diaphragm has a plurality of blades, each blade having a cutout in an edge of the each blade,
- wherein each blade has two cutouts with a cutout width that are separated from each other by a cutout separation distance;
- wherein a cutout fraction is a cutout width divided by cutout separation distance;
- and
- wherein the cutout fraction is between 0.1-0.2,
- wherein edges and cutouts of the plurality of blades form an opening which actinic radiation from the radiation source passes through;
- wherein edges and cutouts of the plurality of blades form the opening.
13 more elements
Dependencies are inferred from the claim text.