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US 12,111,355 B2Granted
Semiconductor substrate yield prediction based on spectra data from multiple substrate dies
AssigneeOnto Innovation Inc.
InventorsXin Song, Jian Lu
Life of this patent
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Abstract
Systems and methods for improving substrate fabrication are provided. Subsets of dies of substrates may be inspected at various points in the fabrication process to generate spectra data. The spectra data can be used to generate data that are input to a machine learning model to predict yields for the substrates.
Claims28
A method for predicting yield of a substrate, the method comprising:
- combining first spectra data for a first die of a plurality of dies on the substrate and second spectra data for the first die of the plurality of dies on the substrate into combined data, the first spectra data for the first die being generated from a first inspection of only the first die of the plurality of dies at a first time, the second spectra data for the first die being generated from a second inspection of only the first die of the plurality of dies at a second time, the second time being different from the first time;
- and
- generating, based on the combined data, a predicted yield for the substrate, including providing the combined data as input to a trained machine learning model.
A non-transient computer-readable medium containing instructions for causing a computing device to:
- combine first spectra data for a first die of a plurality of dies of a substrate and second spectra data for the first die of the plurality of dies on the substrate into combined data, the first spectra data for the first die being generated from a first inspection of only the first die of the plurality of dies at a first time, the second spectra data being generated from a second inspection of only the first die of the plurality of dies at a second time, the second time being different from the first time;
- and
- generate, based on the combined data, a predicted yield for the substrate, including to provide the combined data as input to a trained machine learning model.
Dependencies are inferred from the claim text.