Crack detector units and the related semiconductor dies and methods
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHuan-Neng Chen, Shao-Yu Li
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHuan-Neng Chen, Shao-Yu Li
Estimating the term…
The present disclosure provides a crack detection unit (CDU), a semiconductor die, and a method of detecting a crack of a semiconductor die. The CDU comprises a switching circuit, a crack sensor, and a logic circuit. The switching circuit is configured to enable the crack sensor. The crack sensor is configured to be electrically connected to the switching circuit, the ground, and an operating voltage. The logic circuit is configured to be electrically connected to the switching circuit and the crack sensor, wherein the CDU is enabled based on an input of the logic circuit. The output of the logic circuit indicates whether the crack sensor contains a crack.
A crack detector unit (CDU), comprising:
A semiconductor die, comprising:
A method of detecting a crack in a semiconductor die, comprising:
Dependencies are inferred from the claim text.