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US 12,111,284 B2Granted
Gas sensors with negligible response to humidity and temperature
AssigneeThe Regents of the University of California
InventorsNiharika Gupta, Ali Javey, Hossain Mohammad Fahad
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Abstract
In one example, a gas sensor is provided. The gas sensor includes a substrate, an isolation region formed on outer edges of the substrate, a micro-heater formed on the isolation region, a sensing layer formed on the substrate inside of the isolation region, and a source and drain formed around the sensing layer and inside of the isolation region.
Claims15
A gas sensor, comprising:
- a substrate;
- an isolation region formed on outer edges of the substrate;
- a micro-heater formed on the isolation region;
- a sensing layer formed on the substrate inside of the isolation region;
- and
- a source and drain formed around the sensing layer and inside of the isolation region.
3 more elements
A method for fabricating a gas sensor, comprising:
- providing a substrate;
- forming a silicon dioxide isolation region on outer edges of the substrate;
- doping source and drain regions on the substrate;
- patterning a sensing layer region between the source and drain regions;
- doping the sensing layer region;
- defining source and drain contacts on the source and drain regions, wherein each of the source and drain contacts comprises a layer of nickel and tungsten;
- forming a tungsten micro-heater on the silicon dioxide isolation region;
- and
- depositing a sensing layer on the sensing layer region.
6 more elements
Dependencies are inferred from the claim text.