Vibration isolation table for semiconductor equipment and vibration isolation table system including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHyunchul Kim, Souk Kim, Younghoon Sohn
Life of this patent
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Abstract
A vibration isolation table of the disclosure may include a lower structure including a plurality of block structures, a middle structure on the lower structure, and an upper structure on the middle structure. The plurality of block structures may be spaced apart from one another such that a space is formed between adjacent ones of the plurality of block structures. At least one of the lower structure and the upper structure may include high attenuation concrete.
Claims19
A vibration isolation table for semiconductor equipment, the vibration isolation table comprising:
- a lower structure comprising a plurality of block structures that are elongated in a first direction;
- a middle structure on the lower structure;
- and
- an upper structure on the middle structure,
- wherein the plurality of block structures are spaced apart from one another in a second direction perpendicular to the first direction such that a space is formed between adjacent ones of the plurality of block structures,
- wherein at least one of the lower structure and the upper structure comprises high attenuation concrete,
- wherein the high attenuation concrete comprises a polymer and concrete,
- wherein the high attenuation concrete has a higher vibration attenuation than the concrete, and
- wherein the lower structure has a length in the first direction greater than a length of the upper structure in the first direction.
A vibration isolation table system for semiconductor equipment, the vibration isolation table system comprising:
- an independent foundation structure comprising a floor support and a lattice beam;
- a vibration isolation table on the independent foundation structure;
- and
- a support structure disposed around the vibration isolation table on the independent foundation structure,
- wherein the vibration isolation table comprises
- a lower structure comprising a plurality of block structures,
- an H-beam on the lower structure, and
- an upper structure on the H-beam,
- wherein the plurality of block structures extend and are elongated in a first direction, and are spaced apart from one another in a second direction perpendicular to the first direction such that a space is formed between adjacent ones of the plurality of block structures,
- wherein the H-beam is vertically aligned with each of the plurality of block structures and is elongated in the second direction such that the H-beam extends over each of the plurality of block structures,
- wherein at least one of the lower structure and the upper structure comprises high attenuation concrete comprising a polymer and concrete,
- wherein the high attenuation concrete has a higher vibration attenuation than the concrete, and
- wherein the lower structure has a length in the first direction greater than a length of the H-beam in the first direction.
A vibration isolation table for semiconductor equipment, the vibration isolation table comprising:
- a lower structure comprising a first block, a second block and a third block, each of which is elongated in a first direction and has a bar shape, the first to third blocks being spaced apart from one another in a second direction perpendicular to the first direction such that a space is formed between adjacent ones the first to third blocks;
- an H-beam on the lower structure, the H-beam vertically overlapping only a portion of each of the first to third blocks while being elongated in the second direction;
- and
- an upper structure on the H-beam, the upper structure vertically overlapping at least a portion of each of the first to third blocks and at least a portion of the H-beam and having a parallelepiped shape,
- wherein at least one of the lower structure and the upper structure comprises high attenuation concrete comprising a polymer and concrete, and
- wherein the high attenuation concrete has a higher vibration attenuation than the concrete.
Dependencies are inferred from the claim text.