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US 12,110,907 B2Granted
Heating device and vacuum pump
AssigneePfeiffer Vacuum GmbH
InventorsPierre-Emmanuel Cavarec, Romain Criado, François Roger, Eric Dulac
Life of this patent
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Abstract
A heating device is for a vacuum line in which pumped gases are intended to circulate. The heating device includes at least one radiating body to radiate in the infrared when it is heated to a temperature above 150° C. The at least one radiating body is arranged in the pumping path of the gases.
Claims19
A vacuum pump configured to drive gases to be pumped in a direction of circulation of the gases going from a suction orifice to a discharge orifice, the vacuum pump comprising:
- a stator and at least one rotor configured to rotate in the stator;
- and
- a heating device comprising at least one radiating body configured to radiate in the infrared when the at least one radiating body is heated to a temperature above 150° C., the at least one radiating body being arranged in the pumping path of the gases by being fixed to a body of the stator and by being thermally insulated from inner walls of the stator, the inner walls of the stator and walls of the at least one rotor configured to be in communication with the pumped gases exhibiting an emissivity less than or equal to 0.2, the at least one radiating body having a surface of emissivity greater than or equal 0.4.
Dependencies are inferred from the claim text.