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US 12,110,588 B2Granted
Adjustable fluid inlet assembly for a substrate processing apparatus and method
AssigneePicosun Oy
InventorsTimo Malinen, Väinö Kilpi, Marko Pudas
Life of this patent
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Abstract
A fluid inlet assembly for a substrate processing apparatus includes a fluid inlet pipe configured to pass through a wall of a sealed pressure vessel, a resilient element around the fluid inlet pipe outside the sealed pressure vessel coupling the fluid inlet pipe to the wall, and first and second end parts, the resilient element being coupled therebetween.
Claims15
A fluid inlet assembly for a substrate processing apparatus, comprising:
- a fluid inlet pipe configured to pass through a wall of a sealed pressure vessel;
- a resilient element around the fluid inlet pipe outside the sealed pressure vessel, coupling the fluid inlet pipe to the wall;
- and
- first and second end parts of the fluid inlet assembly, the resilient element being coupled therebetween,
- where the fluid inlet pipe is formed of two pipes arranged to slide inside each other.
2 more elements
Dependencies are inferred from the claim text.