Process chamber and exhaust liner system therefor

An exhaust liner system for use in a process chamber, comprising:

• a lower exhaust liner having a longitudinal axis and an annular body with a longitudinally-extending innermost sidewall that defines a central opening of the annular body;
• an upper flange, a central flange, and a lower flange extending outward from the annular body, wherein the lower flange and the central flange partially define a first plenum, and wherein the central flange and the upper flange partially define a second plenum;
• a plurality of exhaust holes disposed through the longitudinally-extending innermost sidewall from the central opening to the first plenum;
• and
• at least one cutout in the central flange to provide a flow path from the first plenum to the second plenum, wherein the lower exhaust liner defines a gas flow path from the central opening to the first plenum via the plurality of exhaust holes and from the first plenum to the second plenum via the at least one cutout;
• and
• an upper exhaust liner having an annular body disposed on the upper flange of the lower exhaust liner, wherein the upper exhaust liner and the lower exhaust liner partially define a third plenum therebetween.