Polishing method and polishing composition
AssigneeFujimi Incorporated
InventorsYuichiro Nakagai, Hiroyuki Oda, Yasuaki Ito, Shogaku Ide, Shinichiro Takami
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AssigneeFujimi Incorporated
InventorsYuichiro Nakagai, Hiroyuki Oda, Yasuaki Ito, Shogaku Ide, Shinichiro Takami
Estimating the term…
Provided are a polishing method and a polishing composition that are applied to polishing of silicon carbide and allows reduction of rise in pH of the polishing composition and increase in pad temperature during polishing Provided is a method of polishing an object to be polished having a surface formed of silicon carbide. The method includes steps of preparing a polishing composition, and supplying the polishing composition to the object to be polished and polishing the object to be polished. The polishing composition contains permanganate, a metal salt A, and water. The metal salt A is a salt of a metal cation having a pKa of less than 7.0 in form of a hydrated metal ion, and an anion.
A method of polishing an object to be polished, the method comprising:
Dependencies are inferred from the claim text.