Micro probe array device and manufacturing method of the device
AssigneeIndustry-Academic Cooperation Foundation, Dankook University
InventorsJae-Hyoung Park, Seung-Ki Lee, Donggen Choi, So-Bin Shin, Ji-Yeon Kim
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Abstract
A micro probe array device and method of manufacturing are disclosed. In the micro probe array device, a plurality of working electrodes are arranged in an array form, so that an individual electric signal can be applied to an object for each working electrode. In the micro probe array device, the height of the working electrode may be different, the working electrode and the counter electrode may constitute a double electrode, or the substrate may be made of a flexible material.
Claims35
A micro probe array device, comprising:
- a substrate;
- a via contact formed through the substrate;
- a working electrode in the form of a probe formed on an upper end of the via contact;
- a reference electrode formed at a lower end of the via contact and is configured to provide an electric signal flowing through the via contact to the working electrode;
- an insulating layer formed on a portion of the working electrode,
- wherein the working electrode is arranged in an array form, and at least one working electrode having different heights is included in the micro probe array device, and
- a counter electrode disposed on the insulating layer which separates an electrical connection between the counter electrode and the working electrode in manner that when the working electrode and the counter electrode both are in contact with an object, electrical signal flows from the working electrode to the object and flows from the object to the counter electrode.
A micro probe array device, comprising:
- a substrate;
- a via contact formed through the substrate;
- a working electrode in the form of a probe formed on an upper end of the via contact;
- a reference electrode formed at a lower end of the via contact and is configured to provide an electric signal flowing through the via contact to the working electrode;
- a first insulating layer formed on the working electrode;
- a counter electrode formed on the first insulating layer;
- a second insulating layer formed on the counter electrode,
- wherein a flow of the electrical signal between the working electrode, the counter electrode, and objects in contact with the working electrode, and
- the counter electrode is disposed on the first insulating layer which separates an electrical connection between the counter electrode and the working electrode in manner that when the working electrode and the counter electrode both are in contact with an object, electrical signal flows from the working electrode to the object and flows from the object to the counter electrode.
A micro probe array device, comprising:
- a substrate;
- a via contact formed through the substrate;
- a working electrode in the form of a probe formed on an upper end of the via contact;
- a reference electrode formed at a lower end of the via contact and is configured to provide an electric signal flowing through the via contact to the working electrode;
- an insulating layer formed on a portion of the working electrode,
- wherein the substrate is composed of a flexible material that can be bent by external pressure to correspond to the curvature of an object, and
- a counter electrode disposed on first insulating layer which separates an electrical connection between the counter electrode and the working electrode in manner that when the working electrode and the counter electrode both are in contact with the object, electrical signal flows from the working electrode to the object and flows from the object to the counter electrode.
Dependencies are inferred from the claim text.