Control apparatus and vacuum pump provided with said control apparatus

Abstract

A control apparatus includes a constant storage portion that stores constant values of an electromagnet coil including a resistance value Rm, an inductance Lm, a sampling time Ts, etc. A current storage portion stores previous current command values Ir having been regularly sampled by a microcomputer inside a current control circuit. A low-frequency feedback circuit generates a signal for suppressing an error between DC components and low-frequency components of an input current command value Ir and a detected current value IL and outputs the signal. An output voltage computing circuit calculates, based on the input current command value Ir[n+1], a stored value Ir[n] of the current storage portion, a stored value of a constant storage portion, and the signal of the low-frequency feedback circuit, a voltage for suppling the electromagnet coil with a current in accordance with a command, and outputs the calculated voltage.

Dependencies are inferred from the claim text.