Image analysis method and image analysis system

An image analysis system, comprising:

• an electron microscope configured to provide an image of a multi-layer structure;
• a display device configured to display the image of the multi-layer structure;
• and
• an image analysis device coupled to the electron microscope and the display device to obtain the image of the multi-layer structure provided by the electron microscope and output the image of the multi-layer structure to the display device, wherein the image analysis device comprises:
• a storage device comprising an image analysis module;
• and
• a processor coupled to the storage device, wherein
• the processor inputs the image of the multi-layer structure into the image analysis module,
• the processor sets a measurement line segment on the image of the multi-layer structure, wherein the measurement line segment extends along a first direction;
• the processor detects a gray-scale distribution within the measurement line segment corresponding to the image of the multi-layer structure along the measurement line segment through the image analysis module, and
• the processor analyzes the gray-scale distribution through the image analysis module to determine a plurality of dark layer thicknesses and a plurality of light layer thicknesses in the image of the multi-layer structure according to a threshold range.