Plasma generator

A plasma generator, comprising:

• a coaxial tube assembly including a first inner circumferential surface that defines a first recess at one end of the coaxial tube assembly;
• a feed including a first protrusion at a first end of the feed and a second protrusion at a second end of the feed, the second end of the feed being an opposite end of the feed in relation to the first end of the feed;
• and
• a radio frequency (RF) electrode including a second inner circumferential surface that defines a second recess at one end of the RF electrode,
• wherein the first protrusion of the feed is coupled to the first recess of the coaxial tube assembly,
• wherein the second protrusion of the feed is coupled to the second recess of the RF electrode,
• wherein the coaxial tube assembly includes one or more first inner surfaces that define a first insertion groove in the first inner circumferential surface at the one end of the coaxial tube assembly,
• wherein the RF electrode includes one or more second inner surfaces that define a second insertion groove in the second inner circumferential surface at the one end of the RF electrode,
• wherein the plasma generator further includes a first coil spring that is at least partially within the first insertion groove and a second coil spring that is at least partially within the second insertion groove, and
• wherein the coaxial tube assembly, the RF electrode, and the feed are configured to provide an RF power transmission path based on the feed being coupled between the coaxial tube assembly and the RF electrode.

A plasma generator, comprising:

• a coaxial tube assembly including a first inner circumferential surface that defines a first recess at one end of the coaxial tube assembly;
• a feed including a first protrusion at a first end of the feed and a second inner circumferential surface that defines a second recess at a second end of the feed, the second end of the feed being an opposite end of the feed in relation to the first end of the feed;
• and
• a radio frequency (RF) electrode including a second protrusion at one end of the RF electrode,
• wherein the first protrusion of the feed is coupled to the first recess of the coaxial tube assembly,
• wherein the second protrusion of the RF electrode is coupled to the second recess of the feed,
• wherein the coaxial tube assembly includes one or more first inner surfaces that define a first insertion groove in the first inner circumferential surface at the one end of the coaxial tube assembly,
• wherein the feed includes one or more second inner surfaces that define a second insertion groove in the second inner circumferential surface at the second end of the feed,
• wherein the plasma generator further includes a first coil spring that is at least partially within the first insertion groove and a second coil spring that is at least partially within the second insertion groove, and
• wherein the coaxial tube assembly, the RF electrode, and the feed are configured to provide an RF power transmission path based on the feed being coupled between the coaxial tube assembly and the RF electrode.