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US 12,016,087 B2Granted
Heater and method of production of same
AssigneeKYOCERA Corporation
InventorsYasunori Kawanabe, Yoshihiro Okawa, Yuusaku Ishimine, Shinya Terao
Life of this patent
Estimating the term…
Abstract
A heater includes a base body and a resistance heating element. The base body is configured by an insulating material and includes a top surface on which a wafer is placed. The resistance heating element extends in the base body along the top surface. A top surface of the resistance heating element and the base body are in contact with each other. A vacuum or gas-filled gap is interposed between a side surface of the resistance heating element and the base body.
Claims12
A heater comprising:
- an insulating base comprising a predetermined surface on which a wafer is placed, and
- a resistance heating element extending in the base body along the predetermined surface, wherein
- a top surface of the resistance heating element and the base body contact each other, and
- a vacuum or a gas-filled gap is interposed between a side surface of the resistance heating element and the base body, the gap comprises a first height part, and a second height part that is located on a side opposite to the side surface of the resistance heating element with respect to the first height part and has a size in a vertical direction smaller than that of the first height part.
1 more element
Dependencies are inferred from the claim text.