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US 12,015,390 B2Granted
Bulk acoustic wave resonator
AssigneeMg Microelectronics Co., Ltd.
InventorsJianmin Miao, Ruizhen Zhang
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Abstract
Provided is a bulk acoustic wave resonator. The bulk acoustic wave resonator includes an upper electrode, a piezoelectric layer and a lower electrode. The piezoelectric layer is disposed between the upper electrode and the lower electrode. At least one boundary of an orthogonal projection of the piezoelectric layer on the lower electrode includes a plurality of sawtooth structures.
Claims8
A bulk acoustic wave resonator, comprising:
- an upper electrode, a piezoelectric layer and a lower electrode, wherein
- the piezoelectric layer is disposed between the upper electrode and the lower electrode;
- and
- at least one boundary of an orthogonal projection of the piezoelectric layer on the lower electrode comprises a plurality of sawtooth structures;
- wherein a center-to-center distance of adjacent sawtooth structures among the plurality of sawtooth structures is greater than or equal to 2 micrometers.
2 more elements
Dependencies are inferred from the claim text.