Optical system for monitoring plasma reactions and reactors
AssigneeReCarbon, Inc.
InventorsCurtis Peter Tom, Fei Xie, Wei Li, Stefan Andrew McClelland
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AssigneeReCarbon, Inc.
InventorsCurtis Peter Tom, Fei Xie, Wei Li, Stefan Andrew McClelland
Estimating the term…
The present invention provides a plasma generating system that includes: a waveguide; a plasma cavity coupled to the waveguide and configured to generate a plasma therewithin by use of microwave energy; a hollow cylinder protruding from a wall of the waveguide and having a bottom cap that has an aperture; a detection unit for receiving the light emitted by the plasma through the aperture and configured to measure intensities of the light in an ultraviolet (UV) range and an infrared (IR) range; and a controller for controlling the detection unit.
A plasma generating system, comprising:
Dependencies are inferred from the claim text.